Research on the process technology of silicon-based low-loss slow-wave structure of terahertz traveling wave tube based on DRIE. Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics, [S. l.], v. 44, n. 1, 2024. Disponível em: https://www.rpsse.com/index.php/journal/article/view/1. Acesso em: 3 may. 2025.